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The R&D Chemical Dispense Unit offers an economical solution for dispensing chemicals directly to the Fab when a comprehensive system is unnecessary. The CDU ensures fully automated transfer from a single drum to a day tank and then to the Fab. It features an onboard PLC/HMI for simplified control, complete with user interface set points. These set points can be readily adjusted via the HMI to meet the specific requirements of the customer.

 

The onboard Levitronix Centrifugal Pump transports chemicals from the Day Tank to the fabrication area. It utilizes sensors to monitor the Day Tank's levels, enabling the transfer pump to maintain a constant fill. The system is safeguarded by an Overflow Sensor and a Low-Level Sensor to ensure that chemicals do not spill over the Day Tank or introduce air into the fabrication area.

Features:

  • Polypropylene and Stainless Steel cabinets all welded construction for maximum leak integrity
  • Stainless Steel tubing is orbital welded for maximum purity
  • HMI for ease of user interface
  • Remote Shutdown
  • Conforms to Semi Specs

Options:

  • FM4910 Construction
  • DI H2O Spray Gun for wash down
  • External Filter Station
  • Local Alarm Status