PP Chemical Dispense Unit

PP Bulk Chemical Dispense Unit

 

The Chemical Dispense Unit (CDU) provides a cost-effective method for direct dispensing to the Fab. It features a fully automated process for transferring chemicals from the drum to the day tank and onward to the Fab. The CDU comes equipped with an onboard PLC/HMI, which allows for easy control and user interface set points that are readily adjustable via the HMI to meet specific customer requirements.

 

Additionally, the CDU features an integrated Diaphragm Pump that facilitates a smooth transfer from the drum to the day tank, complete with an automatic switch-over capability for managing multiple drums. An alarm system is also in place to notify technicians when a drum is empty and needs to be replaced.

 

In addition, the SCDU includes a Levitronix Centrifugal Pump responsible for the controlled delivery of chemical from the day tank to the fabrication area. It employs sensors to continuously monitor the levels in the day tank, ensuring the transfer pump keeps the tank adequately filled. Safety measures include an Overflow Sensor and a Low-Level Sensor to avert chemical spills from the day tank and prevent air from entering the fabrication area.

Features:

  • Redundant Mag/Lev Pumps
  • Automated dual drum switching
  • Solenoid valves with hot swap and system force capability
  • Tank level monitoring
  • Pressure and flow monitoring
  • Manual DIW/N2 pump and filter purging
  • Maintenance points for purging and draining
  • All wetted parts are PFA and PTFE
  • User friendly HMI
  • Easy access sample station with purge
  • Polypropylene cabinet materials
  • Recirculating DIW spray gun for maintenance
  • PID Loop PSI Control

Safety:

  • Cabinet door interlocks
  • Cabinet leak detection and alarming
  • Cabinet exhaust monitoring
  • Waste pump for cabinet
  • Local and remote EMO capability
  • Cabinet contains 110% of the largest volume

Controls:

  • PLC and HMI
    •  On-screen system P&ID
    •  Manual mode for maintenance and monitoring
    •  Force screens for maintenance and troubleshooting
    •  Pump runtime monitoring
    •  Password protected screens
  • Connectivity to SCADA Ethernet networks

Options:

  • FM4910 cabinet material
  • Parallel 10” or 20” filter housings
  • Temperature monitoring and control
  • Metrology to monitor loop supply
  • Transfer filter