Chemical Delivery Unit

Bulk Chemical Dispense Unit

The Chemical Dispense Unit is a low cost solution to dispensing directly to the Fab. The CDU is fully automated transfer from drum to day tank and deliver from day tank to the Fab. It has on board PLC / HMI for ease of control, with user interface set points. The CDU set points can be easily modified through the HMI for the customers specific needs. The onboard Diaphragm Pump transfers from the Drum to the Day Tank with auto switch over for multiple Drums. It will send an alarm to notify the Tech that a drum is empty and needs to be switched out.

Slurry Chemical Dispense Unit

The Slurry Chemical Dispense Unit is a low cost solution to dispensing slurry directly to the Fab. The SCDU is fully automated transfer from drum to day tank and transfer from day tank to the Fab. It has on board PLC / HMI for ease of control, with user interface set points. The SCDU set points can be easily modified through the HMI for the customers specific needs. The onboard Diaphragm Pump transfers from the Drum to the Day Tank with auto switch over for multiple Drums. It will send an alarm to notify the Tech that a drum is empty and needs to be switched out.

The onboard Levitronix Centrifugal Pump delivers slurry from the Day Tank to the Fab. It monitors the Day Tank levels through sensors that allows the transfer Pump to keep the Day Tank full at all times. The delivery is protected with in Overflow Sensor and Low Level Sensor to insure that chemical does not overflow the Day Tank or send air to the Fab.

Valve Manifold Box

The Smart Valve Manifold Box is a three to eight stick point-of-use VMB with the option of local intelligence that insures the chemical delivery to the process tool.

We offer simple design to fully automated. Our VMB’s have been designed with maximum functionality, reliable and proven in Wafer FAB facilities all through Texas.

Our Valve Manifold Box provides continuous operation to the point of use.  When user assisted operation is required, the Smart VMB can easily be switched into bypass mode for user initiated changes and PMs.

Drum/Bottle Washing Station

The Drum / Bottle Wash Station is capable of washing 1 Drum and 12 Bottles at the same time. Is equipped with adjustable timers for length of wash. Has interlocks to shut down washing if doors are opened.

Gas VMB/Panels

The Gas Valve Manifold Box / Panel is a compact design that allows up to 8 point of uses.

The features and options available for this unit are:

  • FM4910 Material and Stainless Steel
  • Multi-function valves that allow for flow control, sampling and purging with a minimum footprint
  • Automatic shutdown for leak detection or emergency failures
  • Can communicate with other chemical systems (PLC Option)
  • Future expandability for adding another VMB
  • Local Alarm Status

R&D Units

The R & D Units are a compact design that is an economical solution for backing up existing Chemical Delivery Units, or for low use applications delivering chemical directly to the fab.

Hoods

Our Hoods come standard with:

  • Sinks
  • DI/N2 Spray Guns
  • Lights
  • GFI Plugs
  • Storage Compartments

Products available but, not limited to.

All design work is done on the latest CAD software.

All designs are done with 3D Cad software and submitted for customer approval. APS strives on providing a product that fits your needs. We are a custom fabrication shop.